EQUIPMENT

AUTO CLEANING HOOD

YES Heating Technix Co., Ltd. is a heating jacket specialist committed to customer satisfaction, developing and manufacturing products that can be applied across a wide range of fields.

Fixed PM exhaust machine

[ACH-0532]

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Fixed PM Exhaust System [ACH-0532]

Concept

A device that collects the toxic gas fumes generated during cleaning of the main equipment and process chamber and discharges them through the exhaust duct, preventing environmental contamination of the workplace.

Spec

Category Specification
Power Supply Single-phase 220V, 7A
Control Power DC 24V
Utility Clean air, 3/8"
Air Pressure 6~8kg/cm²
Pipe Diameter Ø 100 / Ø 120 (varies by site and line)
Standard Type 1940(L), 30kg
Bellows Hose Length 5.5M or more

Point

  • Maximized suction amplification
  • - Can amplify the suction of existing acid exhaust piping by more than 20 times
  • - A small volume of high-pressure fluid produces a large increase in transport velocity
  • Minimizes flow resistance by eliminating sources of interference and resistance within the piping
  • Applies wiring oxidation protection against gases drawn through the piping
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Moving type PM exhaust machine(HEPA)

[YIC-1603]

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Mobile PM Exhaust System (HEPA) [YIC-1603]

Concept

A device that collects the toxic gas fumes generated during cleaning of the main equipment process chamber and discharges them through the exhaust duct, preventing environmental contamination within the fab.

Spec

Category Specification
Power Supply Single-phase 220V, 7A (plug type)
Equipment Size 480(W) * 480(D) * 810(H)
Weight 80kg
Exhaust Uses the main acid exhaust duct (100A)
Power Cable VCT 1.55Q * 3C * 10M, auto-retracting (recessed type)
Max Air Volume 17.1m³/min
Hood Type Round Ø350 (standard) → custom fabrication available
Discharge Pressure 115mmAq
Inlet Air Velocity 6m/s

Point

  • Ensures worker safety in environments where a fixed Auto Clean exhaust cannot be or has not been installed.
    Blocks environmental-safety hazards; its compact body and size allow use in confined spaces
  • Prevents the spread of harmful gases and fumes during work in the parts cleaning room
  • Prevents corrosion of ancillary equipment in the C.S Room
Product Inquiry

Moving type PM exhaust machine(CHERMICAL)

[YIC-1605]

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Mobile PM Exhaust System (Chemical) [YIC-1605]

Concept

Equipment that effectively neutralizes the harmful gases, volatile organic compounds (VOCs), odors, and fumes generated during semiconductor, laboratory, and chemical-handling processes
before they spread within the laboratory space, protecting the health of engineers, researchers, and R&D personnel and maintaining a comfortable
indoor environment.

Spec

Category Specification
Inlet Air Velocity 10m/s
Operating Voltage Single-phase 220V 60Hz
Power Consumption 950W/5A
Discharge Pressure 450mmAq
Max Air Volume 10m³/min
Body Dimensions 450 X 650 X 1000
Weight 120kg

Point

  • An easy-to-move local unit that blocks the spread of harmful gases in advance, featuring a 360-degree rotatable flexible arm and a multi-joint design
  • YT standard filter type removes acidic, neutral, and basic contaminants
  • Blower: uses a high-efficiency, specially designed blower
  • HEPA filter: uses a HEPA filter that removes 99.7% of fine dust particles 0.3μm and smaller
  • Ductless type: no duct connection required, so installation is simple
  • Chemical filter replacement: integrated filter allows 1:1 replacement
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